Apparatus for an Irradiation Unit
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United States of America Patent
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Issued Date -
Sep 2, 2010
app pub date -
Sep 23, 2008
filing date -
Oct 9, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An apparatus is provided having a chamber for the irradiation of at least one substrate. The apparatus includes a transfer channel for inserting and removing the substrate, a substrate holder inside the chamber, a vacuum pump, and at least one irradiation unit for irradiating the substrate. The irradiation unit has at least one infrared emitter including an integrated reflector.
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