REUSABLE TEMPLATE FOR CREATION OF THIN FILMS; METHOD OF MAKING AND USING TEMPLATE; AND THIN FILMS PRODUCED FROM TEMPLATE
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United States of America Patent
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app pub date -
May 11, 2010
filing date -
Jun 10, 2005
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Abandoned
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Abstract
The present invention is directed generally to templates used in the creation of thin-film replicas, for example, the creation of thin films, such as carbon films, for use as specimen support in electron-beam specimen analysis. More specifically, the present invention is directed to novel reusable patterned templates, the methodology of making these reusable templates, the templates made from such methodologies, the use and reuse of these templates to make thin films of any type for any purpose, and the thin films made from these templates. A feature of the novel template of the present invention is in its employment of one or more zones of discontinuity, or undercuts, associated with the patterns transferred into the template to allow for the removal of the thin film from the template without sacrificing the structural integrity of the template to prevent at least one re-use of the template.
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