PRECISION MICRO-ELECTROMECHANICAL SENSOR (MEMS) MOUNTING IN ORGANIC PACKAGING

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United States of America Patent

APP PUB NO 20100221860A1
SERIAL NO

12488257

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Abstract

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Apparatus and methods for mounting micro-electromechanical (MEMS) sensors in three dimensions, using horizontal and vertical substrates.

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Patent Owner(s)

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HAWAT NOUREDDINENot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hawat, Noureddine Woburn, US 5 39
Nuytkens, Peter R Melrose, US 26 494

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