Method and apparatus for manufacturing magnetic recording medium
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United States of America Patent
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Sep 8, 2015
Grant Date -
Sep 9, 2010
app pub date -
Jul 3, 2008
filing date -
Jul 11, 2007
priority date (Note) -
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Abstract
The present invention provides a method for manufacturing a magnetic recording medium by mounting a substrate for film formation on a carrier, sequentially transporting said substrate into a plurality of connected chambers, and forming at least a magnetic film and a carbon protective film on said substrate for film formation within said chambers, wherein said method comprises a step of conducting ashing to remove an accumulated carbon protective film adhered to a carrier surface, which is performed following a step of removing a magnetic recording medium from said carrier following film formation, but prior to a step of mounting a substrate for film formation on said carrier.
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