Scanning probe microscope
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United States of America Patent
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May 7, 2013
Grant Date -
Sep 23, 2010
app pub date -
Oct 18, 2007
filing date -
Oct 23, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
The invention relates to a scanning probe microscope comprising: a specimen holder holding a specimen; and a probe for scanning the relief of the upper surface of the specimen, which probe is movable in a vertical direction and two orthogonal horizontal directions, wherein the upper surface of the specimen is tilted relative to at least one of the two orthogonal horizontal directions.
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