Beam irradiation device
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United States of America Patent
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Apr 24, 2012
Grant Date -
Sep 30, 2010
app pub date -
Mar 23, 2010
filing date -
Mar 26, 2009
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A beam irradiation device includes a photodetector which receives servo light; a signal processing section which generates a position detection signal based on a detection signal from the photodetector; and a control section which controls the laser light source and the actuator for beam scanning based on the position detection signal. The signal processing section performs a sampling operation with respect to the detection signal from the photodetector at two consecutive sampling timings. The signal processing section includes an A/D converting section which converts a difference between two sampling values obtained by the sampling operation into a digital signal, and a computing section which computes the position detection signal based on the digital signal from the A/D converting section.
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