Structure and method for latchup improvement using through wafer via latchup guard ring
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United States of America Patent
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Aug 2, 2011
Grant Date -
Sep 30, 2010
app pub date -
Mar 26, 2009
filing date -
Mar 26, 2009
priority date (Note) -
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Abstract
A method and structure for preventing latchup. The structure includes a latchup sensitive structure and a through wafer via structure bounding the latch-up sensitive structure to prevent parasitic carriers from being injected into the latch-up sensitive structure.
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