METHODS FOR PLANARIZING A SEMICONDUCTOR CONTACTOR
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United States of America Patent
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app pub date -
Apr 23, 2010
filing date -
Mar 17, 2000
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A planarizer for a probe card assembly. A planarizer includes a first control member extending from a substrate in a probe card assembly. The first control member extends through at least one substrate in the probe card assembly and is accessible from an exposed side of an exterior substrate in the probe card assembly. Actuating the first control member causes a deflection of the substrate connected to the first control member.
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