METHOD OF DOPING AND APPARATUS FOR DOPING
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United States of America Patent
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Issued Date -
Oct 21, 2010
app pub date -
Aug 27, 2008
filing date -
Dec 11, 2007
priority date (Note) -
Abandoned
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Abstract
A method of doping at least one element in an array of elements on a substrate is disclosed. The method comprises providing at least one microfluidic channel passing from a first location external of the at least one element to a second location in fluidic communication with the at least one element. A dopant fluid is passed through the at least one microfluidic channel to the at least one element for doping the at least one element. A corresponding apparatus is also disclosed.
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