DIELECTRIC COATINGS AND USE IN CAPACITORS
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United States of America Patent
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app pub date -
May 10, 2010
filing date -
Feb 7, 2005
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Abandoned
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Abstract
A coated substrate product is described comprising a substrate and a dielectric coating material comprising carbon, hydrogen, silicon, and oxygen. According to the method, the substrate is processed by plasma cleaning the surface and then depositing a dielectric coating by a suitable plasma process. The coating may contain one or more layers. The substrate may be a rigid material or a thin film or foil. The coated products of this invention have superior dielectric material properties and utility as substrates for the manufacture of rolled or parallel plate capacitors with high energy densities.
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