Amorphous thin films and method of manufacturing same
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United States of America Patent
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Apr 8, 2008
filing date -
Nov 26, 2004
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Abstract
The present invention relates to amorphous thin films and methods of manufacturing the same. These amorphous thin films contain zirconium oxide (ZrO.sub.2), preferably at a concentration of at least 30 mol %, and other metal oxides and have surprisingly good mechanical and optical properties. In some embodiments of the present invention, the thin films may be further processed to obtain fluorinated glasses containing the same metal elements as the metal oxides.
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