APPARATUS FOR INSPECTING OBJECT UNDER INSPECTION
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United States of America Patent
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N/A
Issued Date -
Nov 18, 2010
app pub date -
Jan 14, 2009
filing date -
Jan 15, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
In a board inspection system, a line sensor of a first scanning unit scans, via a telecentric lens, the image of the surface to be inspected on a board, viewed in a perpendicular direction. A line sensor of a second scanning unit scans the image of the surface to be inspected on the board, viewed at an angle, which is tilted toward a first direction by a first angle α from the direction perpendicular to the surface to be inspected. A line sensor of a third scanning unit scans the image of the surface to be inspected on the board, viewed at an angle, which is tilted toward a second direction by a second angle β from the direction perpendicular to the surface to be inspected. A determination unit computes the height of the surface to be inspected on the board with use of image data acquired by a first scanning unit, a second scanning unit, and a third scanning unit.
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