Corrosion Protection and Lubrication of MEMS Devices
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United States of America Patent
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N/A
Issued Date -
Nov 18, 2010
app pub date -
May 13, 2009
filing date -
May 13, 2009
priority date (Note) -
Abandoned
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Abstract
Systems and methods, such as for a MEMS device, can include a component having a contact portion that includes on one side a layer including hydrophilic functional groups and a coating formed on the layer. The coating can include hydrophilic functional groups adapted to interact with the hydrophilic functional groups of the layer. The coating can also include hydrophobic functional groups opposite the hydrophilic functional groups of the coating. The layer can be bonded to the component, and the coating can be bonded to the layer. The coating can be adapted to be formed on the layer while in vapor form and can include a lubricant. The layer can be an atomic monolayer or multilayer, such as of aluminum oxide, and the coating can include a fluorinated acid, such as perfluorodecanoic acid.
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