Substrate detection device and substrate conveyance apparatus

United States of America Patent

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Feb 28, 2012
Grant Date
Dec 9, 2010
app pub date
Jan 14, 2009
filing date
Jan 28, 2008

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Abstract

An object is to provide a substrate conveyance apparatus and a substrate detection device capable of improving flexibility in arrangement layout.

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Patent Owner(s)

Patent Owner	Address
PANASONIC CORPORATION	1006 OAZA KADOMA KADOMA-SHI OSAKA 5718501 ?5718501

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G01B:MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIME....

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Inventor Name	Address	# of filed Patents	Total Citations
Isobata, Yoshinori	Fukuoka, JP	30	138
Nakane, Masao	Fukuoka, JP	11	163
Yagi, Shuzo	Saga, JP	12	72

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Substrate detection device and substrate conveyance apparatus

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United States of America Patent

12864785

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PATENT NO	8125651
APP PUB NO	20100309484A1
SERIAL NO	12864785
DOCKET NO

US Family Size	Non-US Coverage
Patent Longevity	Forward Citations

DATE PUBLISHED	PUBLICATION/PATENT NO.	PUBLICATION TYPE
February 28, 2012	US,8125651,B2 US8125651B2	GRANTED PATENT AS SECOND PUBLICATION
December 09, 2010	US,20100309484,A1 US20100309484A1	FIRST PUBLISHED PATENT APPLICATION

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12864785

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