Gas sensor and manufacturing method thereof

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United States of America Patent

PATENT NO 8178157
APP PUB NO 20100310792A1
SERIAL NO

12846562

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A gas sensor and manufacturing method thereof. The gas sensor includes a substrate, a pair of electrodes disposed on the substrate, and a gas sensing thin film covering the electrodes, the gas sensing thin film is made up of carbon nanotubes and tin oxide.

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Patent Owner(s)

Patent OwnerAddress
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE310401 HSINCHU

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lai, Hong-Jen Hsinchu, TW 13 73
Lin, Hong-Ming Hsinchu, TW 21 153
Su, Pi-Guey Hsinchu, TW 6 34
Sun, Yi-Lu Hsinchu, TW 3 20
Wei, Bee-Yu Hsinchu, TW 6 39
Wu, Ren-Jang Hsinchu, TW 5 20

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