MEASUREMENT SYSTEM AND METHOD
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United States of America Patent
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Issued Date -
Dec 23, 2010
app pub date -
Dec 16, 2008
filing date -
Dec 16, 2007
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A multi-station measurement system concept is presented, particularly based on an X-Y stage and plurality of horizontal load/unload units. The system allows loading/unloading of wafers from several load/unload units by the direct action of the X-Y stage, thus creating a buffer for wafers without actually requiring an additional buffer mechanism.
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