Importance

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Abstract

An object of the present invention is to provide a capacitor-forming material having a stable adhesion between a dielectric layer and an electrode-forming layer. To achieve the object, the capacitor-forming material in which an oxides dielectric layer is provided between a top-electrode-forming layer and a bottom-electrode-forming layer, wherein at least one of the top-electrode-forming layer and the bottom-electrode-forming layer has a two-layer construction constituted with a bulk-metal layer and a composite layer composed of metal and metal oxide which is made to contact with the oxides dielectric layer. In particular, it is preferable to employ a capacitor-forming material having the top-electrode-forming layer which has two-layer construction constituted with the bulk-metal layer and the composite layer composed of metal and metal oxide, and has a layer construction in which the bulk-metal layer and the composite layer composed of metal and metal oxide are stacked to make the composite layer composed of metal and metal oxide contact with the oxides dielectric layer.

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First Claim