REDUCED CAPACITY CARRIER, TRANSPORT LOAD PORT, BUFFER SYSTEM
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United States of America Patent
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N/A
Issued Date -
N/A
app pub date -
Sep 20, 2010
filing date -
Nov 7, 2005
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A load port including a frame defining a load port opening, a substrate carrier interface connected to the frame and configured to removably couple with a substrate carrier shell, a load port door configured to interface with a substrate carrier door, the load port door being movably coupled to frame and having a first position substantially blocking the load port opening, and a second position where the load port opening is substantially unblocked by the load port door, and a door coupling member without moving parts, located on the load port door configured to releasably couple with a corresponding member without moving parts on the substrate carrier door, wherein activation of the door coupling member effects coupling between the load port door and substrate carrier door and a passive release of the substrate carrier door from the substrate carrier shell.
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