Multi-chamber heat treatment device and temperature control method

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United States of America Patent

PATENT NO 9109958
APP PUB NO 20110008742A1
SERIAL NO

12810823

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Abstract

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The multi-chamber heat treatment device includes a temperature sensor (31) attached to an object to be treated (X), a signal transmission unit (30) which transmits a detected signal from the temperature sensor to the outside of a heating chamber and a cooling chamber, and a temperature measuring unit (40) which is arranged outside the heating chamber and the cooling chamber to measure the temperature of the object from the detected signal of the temperature sensor transmitted from the signal transmission unit (30).

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Patent Owner(s)

Patent OwnerAddress
IHI CORPORATION1-1 TOYOSU 3-CHOME KOTO-KU TOKYO 135-8710

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Katsumata, Kazuhiko Tokyo, JP 46 141

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