Importance

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Abstract

A semiconductor device is made by providing a semiconductor wafer having semiconductor die separated by a peripheral region. An opening is formed in the peripheral region having a depth less than a thickness of the wafer. A conductive material is deposited in the opening of the peripheral region of the wafer to form a conductive via extending partially through the wafer. The wafer is singulated through the conductive via in the peripheral region to provide a plurality of semiconductor die each having the conductive via. A semiconductor die is mounted on a sacrificial carrier. An encapsulant is deposited over the carrier around the semiconductor die. A portion of the encapsulant and semiconductor die is removed to expose the conductive via. A first and second interconnect structure are formed over the encapsulant and semiconductor die. The first and second interconnect structures are electrically connected to the conductive via.

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First Claim