CAPACITIVE SENSOR HAVING CYCLIC AND ABSOLUTE ELECTRODE SETS
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United States of America Patent
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Issued Date -
Jan 27, 2011
app pub date -
Mar 26, 2008
filing date -
Mar 26, 2008
priority date (Note) -
Abandoned
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Abstract
A capacitive sensor includes first and second variable capacitor electrode sets, respectively disposed upon a planar support surface and a proof mass that is compliantly displaceable along a first axis substantially parallel to the planar support surface. The first electrode set produces a cyclic variation in capacitance over a range of displacement of the proof mass along the first axis, and the second electrode set produces an absolute capacitance variation throughout the range of displacement along the first axis.
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