METHODS FOR MANUFACTURING CHUCKING SYSTEMS
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United States of America Patent
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N/A
app pub date -
Oct 29, 2010
filing date -
Oct 27, 2000
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
Methods for manufacturing chucking systems are described. Generally, a plurality of flow holes may be provided in an optical flat. A surface of the optical flat may be masked and patterned to provide a desired feature (e.g., pins or grooves). The surface may etched to produce the desired feature on the surface of the optical flat.
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