Auto-Stopping Abrasive Composition for Polishing High Step Height Oxide Layer
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United States of America Patent
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Issued Date -
Feb 24, 2011
app pub date -
Apr 28, 2006
filing date -
Apr 28, 2005
priority date (Note) -
Abandoned
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Abstract
Disclosed is a chemical-mechanical polishing composition used in a process for chemical-mechanical polishing of silicon oxide layer having severe unevenness with large step-height. The composition includes abrasive particles of metal oxide; and at least one compound(s) selected from the group consisting of amino alcohols, hydroxycarboxylic acid having at least 3 of the total number of carboxylic acid group(s) and hydroxyl group(s) or their salts, or a mixture thereof. A polymeric organic acid, a preservative, a lubricant and a surfactant may be further contained. The composition shortens the vapor-deposition time of a layer to be polished, saves the raw material to be vapor-deposited, shortens the chemical-mechanical polishing time, and saves the slurry employed.
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