COATING APPARATUS AND COATING METHOD
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United States of America Patent
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Issued Date -
Mar 17, 2011
app pub date -
Aug 13, 2010
filing date -
Sep 14, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
An apparatus for coating a substrate with a layer of inhomogeneous but continuous thickness is provided. The apparatus may include a holding device configured to hold a substrate to be coated; a coating device comprising at least one coating source for providing a coating material, which is arranged at a distance from the holding device; and at least one magnetizing device configured to generate a predetermined magnetic field in the region between the substrate to be coated and the coating source. The magnetizing device may be arranged on the opposite side of the holding device to the coating source.
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