THERMALLY ACTUATED RF MICROELECTROMECHANICAL SYSTEMS SWITCH
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United States of America Patent
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Issued Date -
Mar 17, 2011
app pub date -
Jun 30, 2010
filing date -
Sep 17, 2009
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A radio frequency (RF) micro electromechanical system (MEMS) switch formed on a substrate (e.g., a CMOS substrate). The RF MEMS switch includes a micromechanical member including a flexible switch membrane configured to move between an on state and an off state of the RF MEMS switch. The flexible switch membrane includes a first set of fingers on a sidewall thereof to be vertically coupled with a second set of fingers formed at an output of the RF MEMS switch on the substrate, and an actuation member in operable communication with the micromechanical member and configured to thermally actuate the micromechanical member such that the first set of fingers electrically couple with the second set of fingers upon thermal actuation of the micromechanical member to enable transmission of an RF signal.
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