METHOD AND RESULTING STRUCTURE USING SILVER FOR LCOS DEVICES
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United States of America Patent
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app pub date -
Nov 30, 2010
filing date -
Sep 19, 2008
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Abstract
An LCOS device includes a semiconductor substrate and a plurality of MOS transistors that is formed on a portion of the semiconductor substrate. The LCOS device includes a first dielectric layer overlying the plurality of MOS transistors and a patterned metal layer overlying the first dielectric layer. The patterned metal layer exposes portions of the first dielectric layer that form borders surrounding the patterned metal layer, wherein the patterned metal layer includes a plurality of electrodes. The LCOS device further includes a second dielectric layer overlying the exposed portions of the first dielectric layer. In an embodiment, the patterned metal layer comprises a silver bearing material. Each of the plurality of electrodes has an upper surface having a surface roughness of less than 5 Angstrom and a surface reflectivity of greater than 97% for a light having a wavelength of 500 nanometers and greater.
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