MULTIPLE-SIDED CMP PAD CONDITIONING DISK
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United States of America Patent
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N/A
Issued Date -
Apr 28, 2011
app pub date -
Aug 7, 2009
filing date -
Aug 7, 2009
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A conditioning tool for restoring a used CMP polishing pad to an operable condition. The tool includes a base that attaches to a driven machine and has a surface from which a shoulder protrudes that receives a peripheral edge of a disk. The disk has two opposing surfaces, each of which is substantially planar and has abrasive mounted thereon. The disk's peripheral edge is held in place between the base shoulder and a ring that has a shoulder that is complementary to the disk's peripheral edge. The ring is fastened to the base with the abrasive of the first disk surface protruding through an aperture in the ring, and the opposing disk surface spaced from the base's surface. After the disk's first surface is worn, the disk can be turned around to expose the opposite surface's abrasive to a CMP pad.
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Cited Art Landscape
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