LASER PROCESSING METHOD, METHOD FOR DIVIDING WORKPIECE, AND LASER PROCESSING APPARATUS
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United States of America Patent
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app pub date -
Oct 28, 2010
filing date -
Oct 29, 2009
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Abandoned
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Abstract
A laser processing method for performing laser processing for reducing light absorption on a processing trail is provided. When an irradiated range on a surface of a workpiece is modulated by modulating an irradiating state of a pulse laser beam from a light source, a processed region which has a continuous portion in a first direction and in which a state of a cross section vertical to the first direction changes in the first direction is formed. Concretely, scanning by means of the pulse laser beam is performed under an irradiating condition that beam spots of the laser beam per unit pulse are discrete along the first direction, or scanning by means of the pulse laser beam in the first direction is performed while the irradiation energy of the pulse laser beam is being modulate, or scanning by means of the pulse laser beam in a second direction and a third direction that have predetermined angles with respect to the first direction are alternatively repeated. As a result, a scanning trajectory of the pulse laser beam on the workpiece is allowed to cross the division planned line along the first direction repeatedly and alternatively so that the processed region can be realized.
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