Importance

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Abstract

The objective of the present invention is to provide a target exchange type plasma generating apparatus in which the positions of two targets can be adjusted independent of each other. A target exchanging mechanism (6) of a plasma generating apparatus for generating plasma by vacuum arc discharge comprises a main holder (32) driven half a rotation by a main motor (M), containing sections (32a, 32b) arranged opposite to each other across the diameter of the main holder, auxiliary holders (16, 18) rotatably contained in the containing sections (32a, 32b), two auxiliary motors (M.sub.1, M.sub.2) for spinning the auxiliary holders, sliders (S.sub.1, S.sub.2) for vertically moving the auxiliary holders (16, 18) in the direction of the spinning shafts of the auxiliary holders, and targets (T.sub.1, T.sub.2) fitted to the auxiliary holders (16, 18). The positions of the targets (T.sub.1, T.sub.2) are exchanged by rotating the main holder (32) by half a rotation. When the main holder (32) is stationary, the targets (T.sub.1, T.sub.2) are driven so as to be rotated and vertically moved independent of each other to a discharge position and a polishing position.

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First Claim