Method and device for monitoring movement of mirrors in a MEMS device
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United States of America Patent
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Oct 8, 2013
Grant Date -
May 12, 2011
app pub date -
Oct 29, 2010
filing date -
Oct 29, 2009
priority date (Note) -
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Abstract
A method for monitoring movement of at least one moving mirror in a MEMS device comprising one or more moving mirrors, and wherein the monitoring is based upon capacitance changes over time in the MEMS device. The method comprises the steps of: if the at least one moving mirror is an in-plain mirror, then: a. providing DC voltage to the MEMS device in addition to a driving voltage required for the movement of that at least one moving mirror; b. measuring current proportional to capacitance changes associated with the movement of the at least one moving mirror; and c. monitoring the movement of the at least one moving mirror based on the measured current. If the at least one moving mirror is a staggered mirror, then: d. measuring a current associated with the movement of the at least one moving mirror; e. identifying a plurality of ripples associated with capacitance changes in the MEMS device over time, in the measured current; and f. monitoring the movement of the at least one moving mirror based on the identified plurality of ripples.
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