Method for producing an electronic component and electronic component

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United States of America Patent

PATENT NO 8658442
SERIAL NO

12865358

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Abstract

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A method for producing an electronic component comprising barrier layers for the encapsulation of the component comprises, in particular, the following steps: providing a substrate (1) with at least one functional layer (22), applying at least one first barrier layer (3) on the functional layer (22) by means of plasma-enhanced atomic layer deposition (PEALD), and applying at least one second barrier layer (4) on the functional layer (22) by means of plasma-enhanced chemical vapor deposition (PECVD).

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Patent Owner(s)

  • OSRAM OLED GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Heuser, Karsten Erlangen, DE 76 1036
Klein, Markus Tegernheim, DE 136 860
Paetzold, Ralph Roth, DE 25 327
Schlenker, Tilman Nittendorf, DE 37 368
Schmid, Christian Regensburg, DE 108 529
Zull, Heribert Regensburg, DE 21 141

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