HYBRID BULK ACOUSTIC WAVE RESONATOR
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United States of America Patent
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Issued Date -
May 26, 2011
app pub date -
Nov 24, 2009
filing date -
Nov 24, 2009
priority date (Note) -
Abandoned
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Abstract
A hybrid bulk acoustic wave (BAW) resonator comprises a first electrode, a second electrode, a piezoelectric layer disposed between the first and second electrodes, and a single mirror pair disposed adjacent the second electrode. In one example, the hybrid bulk acoustic wave resonator further comprises a substrate, and the first electrode is disposed adjacent the substrate. A method of fabricating a hybrid BAW resonator is also disclosed.
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