Small plasma chamber systems and methods
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United States of America Patent
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Aug 18, 2015
Issued Date -
N/A
app pub date -
Dec 1, 2010
filing date -
Dec 3, 2009
priority date (Note) -
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Abstract
A plasma etch processing tool is disclosed. The plasma etch processing tool, comprising a substrate support for supporting a substrate having a substrate surface area, a processing head including a plasma microchamber having an open side that is oriented over the substrate support, the open side of the plasma microchamber having a process area that is less than the substrate surface area, a sealing structure defined between the substrate support and the processing head and a power supply connected to the plasma microchamber and the substrate support. A method for performing a plasma etch is also disclosed.
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