LASER MACHINING AND SCRIBING SYSTEMS AND METHODS
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United States of America Patent
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app pub date -
Dec 7, 2010
filing date -
Dec 7, 2009
priority date (Note) -
Abandoned
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Abstract
A laser machining system may include an opposite side camera to provide workpiece alignment from an opposite side of the system (i.e., the side opposite the laser machining process). The opposite side camera may be used with an air bearing positioning stage, and a portion of the stage and/or the opposite side camera may be moved to allow the opposite side camera to image a feature on the workpiece to be aligned. The opposite side alignment may be used with back side scribing and/or dual side scribing of a workpiece with alignment from one or both sides of the workpiece. Laser machining systems and methods may also be used to provide quasi-stealth scribing and multi-beam scribing.
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