METHOD OF PROBE ALIGNMENT
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United States of America Patent
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Issued Date -
Jun 9, 2011
app pub date -
Jun 8, 2009
filing date -
Jun 6, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method of probe alignment is described in which an interrogating light beam is aligned with the probe of a scanning probe microscope. The methods described ensure that the light beam is positioned as closely as possible to a point directly above the probe tip. This improves image quality by removing variations that may arise if cantilever deflection is allowed to vary during the course of a scan and/or if scanning at high scanning speeds that may excite transient motion of the probe.
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