MULTI-WAVELENGTH LASER-SCRIBING TOOL

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United States of America Patent

APP PUB NO 20110139755A1
SERIAL NO

12939137

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Abstract

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Multi-wavelength laser-scribing systems are disclosed. A system for scribing a workpiece includes a frame, a translation stage coupled with the frame to support the workpiece and translate the supported workpiece relative to the frame in a longitudinal direction, at least one laser operable to generate a first output having a first wavelength and generate a second output having a second wavelength, and at least one scanning device coupled with the frame and operable to control a position of the first and second outputs. Each of the first and second outputs are able to remove material from at least a portion of the workpiece. Laser assemblies that each include a laser and at least one scanning device can be arranged in rows to enhance the rate at which latitudinal scribe lines are formed.

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Patent Owner(s)

Patent OwnerAddress
FORTIX INC548-19 GAGWADONG SEOGU INCHEON

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hsu, Wei-Yung San Jose, US 99 1485
Manens, Antoine P Sunnyvale, US 64 779
Thothadri, Manivannan Mountain View, US 34 179
Yasuda, Arthur Kenichi Belmont, US 2 525

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