SILICON CARBIDE-BASED ANTIREFLECTIVE COATING
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United States of America Patent
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Issued Date -
Jun 23, 2011
app pub date -
May 28, 2009
filing date -
May 28, 2008
priority date (Note) -
Abandoned
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Abstract
The present invention relates to an antireflective coating comprising an amorphous silicon carbide-based film, which film further comprises hydrogen atoms and optionally further comprises oxygen and/or nitrogen, the film having an effective refractive index (n) between 2.3 and 2.7 and an extinction coefficient (k) of less than 0.01 at a wavelength of 630 nm. The present invention also relates to methods for preparing the antireflective coating and to solar cells comprising the antireflective coating.
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