HIGH THROUGHPUT SEM TOOL
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United States of America Patent
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N/A
Issued Date -
Jul 7, 2011
app pub date -
Feb 22, 2008
filing date -
Feb 22, 2007
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A scanning charged particle beam device (100) is described. The scanning charged particle beam device includes a beam emitter (102) for emitting a primary electron beam, a first scan stage for scanning the beam over a specimen, an achromatic beam separator (130) adapted for separating a signal electron beam from the primary electron beam, and a detection unit (172,174,178) for detecting signal electrons.
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