SEGMENTED CONTACTOR
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United States of America Patent
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N/A
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app pub date -
Mar 28, 2011
filing date -
Jun 7, 1999
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
A method of fabricating a large area, multi-element contactor. A segmented contactor is provided for testing semiconductor devices on a wafer that comprises a plurality of contactor units mounted to a substrate. The contactor units are formed, tested, and assembled to a backing substrate. The contactor units may include leads extending laterally for connection to an external instrument such as a burn-in board. The contactor units include conductive areas such as pads that are placed into contact with conductive terminals on devices under test.
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