Optical assembly

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 8570676
APP PUB NO 20110181857A1
SERIAL NO

13046170

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Abstract

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An optical assembly supported in an arrangement, especially in an objective or in an illuminating or exposure system, in the interior of a housing comprising at least one optical element, especially a lens, a mirror, or an aperture, wherein the at least one element is influenceable by at least one manipulator is characterized in that the at least one manipulator is arranged either outside of the housing or in a holding means that is separated entirely or to a large extent by the help of a decoupling means, and that there is provided an effective coupling between the manipulator and the element to be influenced by the manipulator in the interior of the arrangement.

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Patent Owner(s)

  • CARL ZEISS SMT GMBH

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aubele, Karl-Eugen Geislingen/Steige, DE 18 404
Bieg, Hermann Huettlingen, DE 14 48
Kwan, Yim-Bun Patrick Aalen, DE 67 438
Nguyen, Uy-Liem Zurich, CH 20 103
Sanvido, Saverio Glattbrugg/ZH, CH 11 58
Schmidt, Martin Windisch, CH 227 2261
Xalter, Stefan Oberkochen, DE 43 380

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