APPARATUS FOR STEM SAMPLE INSPECTION IN A CHARGED PARTICLE BEAM INSTRUMENT
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United States of America Patent
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app pub date -
May 4, 2011
filing date -
Apr 23, 2007
priority date (Note) -
Abandoned
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Abstract
An apparatus for in-situ sample examination in a dual-beam FIB includes a cassette for holding probe tips inside the FIB, where the FIB has an X-Y plane and a port for a nano-manipulator probe shaft, and where the probe shaft is further capable of releasably holding a probe tip. The cassette has a base and at least one probe-tip station connected to the base. The probe-tip station has a slot for receiving a probe tip, where the probe-tip slot has an angle with respect to the base substantially equal to the angle of the port for the nano-manipulator probe shaft relative to the X-Y plane of the FIB. The cassette has a clamp with springy fingers located in the slot for receiving and releasably holding the probe tip. The apparatus is adapted to in-situ STEM examination of samples.
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