Non-aqueous, non-corrosive microelectronic cleaning compositions containing polymeric corrosion inhibitors
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United States of America Patent
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Apr 27, 2011
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Dec 10, 2004
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Abstract
Photoresist strippers and cleaning compositions of this invention are provided by non-aqueous cleaning compositions that are essentially non-corrosive toward copper as well as aluminum and that comprise at least one polar organic solvent, at least one hydroxylated organic amine, and at least one corrosion inhibitor polymer having multiple hydroxyl- or amino-functional groups pendant from the polymer backbone.
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