METHOD AND APPARATUS FOR AUTOMATED FAB CONTROL
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United States of America Patent
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app pub date -
May 17, 2011
filing date -
Jul 5, 2005
priority date (Note) -
Abandoned
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Abstract
A method, apparatus, and a system for prioritizing processing of a workpiece is provided. At least one workpiece is processed. A tag associated with the workpiece is provided. The tag includes process priority data for determining an order relating to processing the workpiece.
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Cited Art Landscape
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