DEFECT CAPPING FOR REDUCED DEFECT DENSITY EPITAXIAL ARTICLES

United States of America Patent

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Issued Date
Sep 15, 2011
app pub date
Mar 12, 2010
filing date
Mar 12, 2010

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Abandoned

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that is ≧ two times lower than an average crystalline defect density in that area at or below the substrate surface.

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Patent Owner	Address
ENTEGRIS INC	129 CONCORD ROAD BILLERICA MA 01821

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H01L:SEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICE....

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[Patents Count]

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Inventor Name	Address	# of filed Patents	Total Citations
Arjunan, Arul Chakkaravarthi	Gainesville, US	12	89
Singh, Deepika	Gainesville, US	27	254
Singh, Rajiv K	Gainesville, US	44	794

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DEFECT CAPPING FOR REDUCED DEFECT DENSITY EPITAXIAL ARTICLES

Number of patents in Portfolio can not be more than 2000

United States of America Patent

12723309

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12723309

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