HYBRID GAS INJECTOR
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United States of America Patent
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N/A
Issued Date -
Sep 29, 2011
app pub date -
Sep 24, 2010
filing date -
Sep 25, 2009
priority date (Note) -
Abandoned
status (Latency Note)
Importance
Abstract
A gas injector for use in injecting process gas into a space in a vertical furnace between a tower supporting multiple wafers and a tubular liner includes a tubular straw having an open distal end and a first bore extending along a first axis and composed of a first single material selected from the group consisting of silicon, quartz, and silicon carbide, and a connector detachably connected to the straw section, composed of a second material other than the first material and including a supply tube having a second bore extending along a second axis perpendicular to the first axis and in fluid communication with the first bore and having a distal end connectable to a gas supply line.
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