METHODS OF FORMING A THIN-FILM SOLAR ENERGY DEVICE
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United States of America Patent
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Issued Date -
Sep 29, 2011
app pub date -
Mar 23, 2010
filing date -
Mar 23, 2010
priority date (Note) -
Abandoned
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Abstract
A method and apparatus for making solar cell active layers is provided. A doped microcrystalline semiconductor layer is formed with a bandgap-enhancing alloy material at low hydrogen flow rates. Deposition conditions are established at a low flowrate of the semiconductor source and ramped to a high flowrate as a first sublayer is deposited. The bandgap-enhancing alloy material is added to the reaction mixture to deposit a second sublayer. The bandgap-enhancing alloy material may optionally be stopped to deposit a third sublayer.
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