ADVANCED PLATFORM FOR PROCESSING CRYSTALLINE SILICON SOLAR CELLS
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United States of America Patent
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Issued Date -
Oct 6, 2011
app pub date -
Apr 6, 2010
filing date -
Apr 6, 2010
priority date (Note) -
Abandoned
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Abstract
The present invention generally provides a batch substrate processing system for in-situ processing of a film stack used to form regions of a solar cell device. The batch processing system is configured to process an array of substrates positioned on a substrate carrier. The batch processing system includes a substrate transport interface that provides loading an unloading of the array of substrates in a production line environment. The substrate transport interface may include one or more of a substrate carrier cleaning module, a substrate carrier cooling module, and a substrate carrier buffer module.
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