SEMICONDUCTOR DEVICES COMPRISING ANTIREFLECTIVE CONDUCTIVE LAYERS AND METHODS OF MAKING AND USING

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United States of America Patent

APP PUB NO 20110247690A1
SERIAL NO

13140806

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Abstract

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A semiconductor device includes a semiconductor substrate and an antireflective conductive layer. The antireflective conductive layer includes a metal layer disposed on the semiconductor substrate and defining at least one array of apertures through the metal layer. Each of the apertures has a width of no more than 5 μm and a distance between each aperture and its nearest neighboring aperture is no more than 10 μm. The antireflective conductive layer also includes a solid material filling each of the apertures, wherein the solid material has an index of refraction of at least 1.1.

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Patent Owner(s)

Patent OwnerAddress
CROUSE DAVID THOMASNot Provided

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Crouse, David Thomas New York, US 7 13
Crouse, Michael M East Greenbush, US 6 24
James, Thomas L Newy York, US 5 75

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