TESTING APPARATUS FOR ELECTRONIC DEVICES
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United States of America Patent
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Issued Date -
Oct 13, 2011
app pub date -
Apr 4, 2011
filing date -
Apr 12, 2010
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Abstract
A wafer processing apparatus used for the testing of electronic devices comprises first and second clampers movably mounted on a shaft, each clamper being configured for holding a wafer carrier on which a wafer is mounted. Clamping fingers on each of the first and second clampers are operative to clamp onto the wafer carrier to hold the wafer carriers, and the clampers are operative to move the wafer carriers reciprocally between a loading position and a wafer processing location for processing the wafers.
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