RACK AND PINION MECHANISM, VACUUM PROCESSING APPARATUS, METHOD OF DRIVING AND CONTROLLING RACK AND PINION MECHANISM, DRIVE CONTROL PROGRAM, AND RECORDING MEDIUM
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United States of America Patent
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Issued Date -
Oct 20, 2011
app pub date -
Dec 9, 2009
filing date -
Dec 9, 2008
priority date (Note) -
Abandoned
status (Latency Note)
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Abstract
The present invention provides a rack and pinion mechanism which avoids collision between respective tooth tops of a rack gear and a pinion gear due to a phase shift between the rack gear and the pinion gear with a simple mechanism and meshes the rack gear and the pinion gear smoothly., storing the detected phase difference, and controls the phase difference of the pinion gear in the subsequent process based on the phase difference of the pinion gear in the current process.
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